A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope

• Frances I. Allen

Beilstein J. Nanotechnol. 2021, 12, 633–664, doi:10.3762/bjnano.12.52

Scanning transmission helium ion microscopy on carbon nanomembranes

• Daniel Emmrich,
• Annalena Wolff,
• Nikolaus Meyerbröker,
• Jörg K. N. Lindner,
• André Beyer and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 222–231, doi:10.3762/bjnano.12.18

• energy-filtered transmission electron microscopy measurements. Keywords: carbon nanomembranes; dark field; helium ion microscopy (HIM); scanning transmission ion microscopy (STIM); SRIM simulations; Introduction Throughout the past decade, the helium ion microscope (HIM) has emerged as a versatile

Imaging of SARS-CoV-2 infected Vero E6 cells by helium ion microscopy

• Natalie Frese,
• Patrick Schmerer,
• Martin Wortmann,
• Matthias Schürmann,
• Matthias König,
• Michael Westphal,
• Friedemann Weber,
• Holger Sudhoff and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2021, 12, 172–179, doi:10.3762/bjnano.12.13

• Helium ion microscopy (HIM) offers the opportunity to obtain direct views of biological samples such as cellular structures, virus particles, and microbial interactions. Imaging with the HIM combines sub-nanometer resolution, large depth of field, and high surface sensitivity. Due to its charge

• bioimaging, especially for the imaging of interactions between viruses and their host organisms. Keywords: bioimaging; cell membrane; charge compensation; helium ion microscopy; SARS-CoV-2; Vero E6 cells; Introduction The last decade of helium ion microscopy (HIM) was characterized by a rapid exploration

Bio-imaging with the helium-ion microscope: A review

• Matthias Schmidt,
• James M. Byrne and
• Ilari J. Maasilta

Beilstein J. Nanotechnol. 2021, 12, 1–23, doi:10.3762/bjnano.12.1

• of Physics, University of Jyväskylä, P.O. Box 35, FI-40014 Jyväskylä, Finland 10.3762/bjnano.12.1 Abstract Scanning helium-ion microscopy (HIM) is an imaging technique with sub-nanometre resolution and is a powerful tool to resolve some of the tiniest structures in biology. In many aspects, the HIM

• imaging of biological specimens. We also discuss some technical features of this unique type of instrument and highlight some of the new advances which will likely become more widely used in the years to come. Keywords: bio-imaging; flood gun; helium-ion microscopy; high resolution; HIM; HIM-SIMS

• ions. Whilst accelerator-based transmission ion-microscopy using protons or alpha particles has been used to investigate biological specimens since the 1980s [53], none of the few (scanning) transmission helium-ion microscopy (THIM) studies using 10 to 40 kV helium ions have imaged biological specimens

Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

• Eduardo Serralta,
• Nico Klingner,
• Olivier De Castro,
• Michael Mousley,
• Santhana Eswara,
• Serge Duarte Pinto,
• Tom Wirtz and
• Gregor Hlawacek

Beilstein J. Nanotechnol. 2020, 11, 1854–1864, doi:10.3762/bjnano.11.167

• combines the helium ion microscopy techniques with SIMS using a magnetic sector spectrometer, STIM with this new detector, and cryo-microscopy capabilities in a single instrument and will be described in detail elsewhere. In comparison to a commercial HIM, this microscope has a larger vacuum chamber that

• upper left half and gold deposited on the lower left half. (b) TRIDYN simulation of the angular distribution of the transmitted beam. Helium ion microscopy images of the nanoporous polycrystalline silicon membrane. (a) SE image. (b) BF STIM image with polar angle θ < 3° and ϕ from 0 to 360°. Post

• also detect channeling-related contrast on polycrystalline silicon, thallium chloride nanocrystals, and single-crystalline silicon by comparing the signal transmitted at different directions for the same data set. Keywords: bright-field; channeling; dark-field; delay line detector; helium ion

Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

• Nico Klingner,
• Gregor Hlawacek,
• Paul Mazarov,
• Wolfgang Pilz,
• Fabian Meyer and
• Lothar Bischoff

Beilstein J. Nanotechnol. 2020, 11, 1742–1749, doi:10.3762/bjnano.11.156

Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams

• Serguei Chiriaev,
• Luciana Tavares,
• Vadzim Adashkevich,
• Arkadiusz J. Goszczak and
• Horst-Günter Rubahn

Beilstein J. Nanotechnol. 2020, 11, 1693–1703, doi:10.3762/bjnano.11.151

• He+, Ne+, and Ga+ FIBs. Helium ion microscopy (HIM) images of a 5 nm Pt60Pd40/200 nm PMMA sample irradiated at a fluence of 1.2 × 1016 cm−2 with He+ (a) and Ga+ FIB (b). In (a) and (b), dashed lines indicate the border between the irradiated (lower parts) and non-irradiated regions (upper parts

Helium ion microscope – secondary ion mass spectrometry for geological materials

• Matthew R. Ball,
• Richard J. M. Taylor,
• Joshua F. Einsle,
• Fouzia Khanom,
• Christelle Guillermier and
• Richard J. Harrison

Beilstein J. Nanotechnol. 2020, 11, 1504–1515, doi:10.3762/bjnano.11.133

• well as practicalities for geological sample analyses of Li alongside a discussion of potential geological use cases of the HIM–SIMS instrument. Keywords: geoscience; helium ion microscopy (HIM); lithium; secondary ion mass spectrometry (SIMS); Introduction The helium ion microscope (HIM) is a

An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization

• Santiago H. Andany,
• Gregor Hlawacek,
• Stefan Hummel,
• Charlène Brillard,
• Mustafa Kangül and
• Georg E. Fantner

Beilstein J. Nanotechnol. 2020, 11, 1272–1279, doi:10.3762/bjnano.11.111

• integration. Keywords: atomic force microscopy (AFM); combined setup; correlative microscopy; helium ion microscopy (HIM); self-sensing cantilevers; Introduction Shortly after the invention of the atomic force microscope (AFM) in 1986 [1], efforts were made towards combining this scanning probe microscopy

3D superconducting hollow nanowires with tailored diameters grown by focused He⁺ beam direct writing

• Rosa Córdoba,
• Alfonso Ibarra,
• Dominique Mailly,
• Isabel Guillamón,
• Hermann Suderow and
• José María De Teresa

Beilstein J. Nanotechnol. 2020, 11, 1198–1206, doi:10.3762/bjnano.11.104

• . Helium ion microscopy in combination with a precursor gas can be used for direct writing of three-dimensional nanostructures with a precise control of their geometry, and a significantly higher aspect ratio than other additive manufacturing technologies. We report here on the deposition of 3D hollow

Revealing the local crystallinity of single silicon core–shell nanowires using tip-enhanced Raman spectroscopy

• Marius van den Berg,
• Ardeshir Moeinian,
• Arne Kobald,
• Yu-Ting Chen,
• Anke Horneber,
• Steffen Strehle,
• Alfred J. Meixner and
• Dai Zhang

Beilstein J. Nanotechnol. 2020, 11, 1147–1156, doi:10.3762/bjnano.11.99

• the shell region. f) Illustration of the interface between the SiNW core and the shell. Scale bars are for a) 5 nm, b) 5 nm−1, c) 100 nm, d) 200 nm, e) 10 nm and f) 5 nm. a) Representative helium ion microscopy image of a SiNW, which is supported on a Au-coated Si wafer. b) Hyperspectral image of the

• characterizing the SiNWs using helium-ion microscopy and E. Nadler for characterizing the Au tip using scanning electron microscopy. We also acknowledge the use of the WSXM software, which is used for illustrating the optical and topography images [44].

Stationary beam full-field transmission helium ion microscopy using sub-50 keV He⁺: Projected images and intensity patterns

• Michael Mousley,
• Santhana Eswara,
• Olivier De Castro,
• Olivier Bouton,
• Nico Klingner,
• Christoph T. Koch,
• Gregor Hlawacek and
• Tom Wirtz

Beilstein J. Nanotechnol. 2019, 10, 1648–1657, doi:10.3762/bjnano.10.160

• impact on the final intensity distribution in the far field. Hence, the different processes contributing to the final intensities will need to be understood in order to decouple and study the relevant ion-beam scattering and deflection phenomena. Keywords: charging; helium ion microscopy; ion

• addition to the lower energy of the secondary electron (SE) emission [3], the absence of back-scattered electrons allows imaging with a He+ probe to be more surface sensitive than imaging with an electron probe. For these reasons, helium ion microscopy (HIM) is increasingly being used to study a wide range

Size limits of magnetic-domain engineering in continuous in-plane exchange-bias prototype films

• Alexander Gaul,
• Daniel Emmrich,
• Timo Ueltzhöffer,
• Henning Huckfeldt,
• Hatice Doğanay,
• Johanna Hackl,
• Muhammad Imtiaz Khan,
• Daniel M. Gottlob,
• Gregor Hartmann,
• André Beyer,
• Dennis Holzinger,
• Slavomír Nemšák,
• Claus M. Schneider,
• Armin Gölzhäuser,
• Günter Reiss and
• Arno Ehresmann

Beilstein J. Nanotechnol. 2018, 9, 2968–2979, doi:10.3762/bjnano.9.276

• . Keywords: exchange bias; helium ion microscopy; ion bombardment induced magnetic patterning; magnetic domains; magnetic nanostructures; Introduction Engineered magnetic domains with deliberately set magnetic properties and designed shapes in thin-film systems have proven to be useful in memory [1][2] and

Site-controlled formation of single Si nanocrystals in a buried SiO₂ matrix using ion beam mixing

• Xiaomo Xu,
• Thomas Prüfer,
• Daniel Wolf,
• Hans-Jürgen Engelmann,
• Lothar Bischoff,
• René Hübner,
• Karl-Heinz Heinig,
• Wolfhard Möller,
• Stefan Facsko,
• Johannes von Borany and
• Gregor Hlawacek

Beilstein J. Nanotechnol. 2018, 9, 2883–2892, doi:10.3762/bjnano.9.267

• between the SiO2 layers and perpendicular to the incident Ne+ beam. Keywords: helium ion microscopy; ion beam mixing; Monte Carlo simulations; phase separation; single electron transistor; Introduction Silicon has been the main material in the semiconductor industry for almost all use cases with the

Defect formation in multiwalled carbon nanotubes under low-energy He and Ne ion irradiation

• Santhana Eswara,
• Jean-Nicolas Audinot,
• Brahime El Adib,
• Maël Guennou,
• Tom Wirtz and
• Patrick Philipp

Beilstein J. Nanotechnol. 2018, 9, 1951–1963, doi:10.3762/bjnano.9.186

• directly related to the number of defects in CNTs [30], or X-ray photoelectron spectroscopy (XPS) which provides some information on the chemical environment of the carbon atoms [31]. In this context, it is to be noted that helium ion microscopy (HIM) has received increasing attention recently as a high

The inhibition effect of water on the purification of natural gas with nanoporous graphene membranes

• Krzysztof Nieszporek,
• Tomasz Pańczyk and
• Jolanta Nieszporek

Beilstein J. Nanotechnol. 2018, 9, 1906–1916, doi:10.3762/bjnano.9.182

• engineers. While considering production techniques, the application of focused electron beam irradiation in transmission electron microscopy makes it possible to determine graphene membranes with well-defined pore diameter [3]. Similar possibilities are also created by modified helium ion microscopy for

Graphene composites with dental and biomedical applicability

• Sharali Malik,
• Felicite M. Ruddock,
• Adam H. Dowling,
• Kevin Byrne,
• Wolfgang Schmitt,
• Ivan Khalakhan,
• Yoshihiro Nemoto,
• Hongxuan Guo,
• Lok Kumar Shrestha,
• Katsuhiko Ariga and
• Jonathan P. Hill

Beilstein J. Nanotechnol. 2018, 9, 801–808, doi:10.3762/bjnano.9.73

• 0.47 eV). High resolution spectra for the core level C 1s and O 1s were recorded in 0.05 eV steps. An electron flood gun was used during the measurements to prevent sample charging. The FLG material was also characterized by TEM, HRTEM (Jeol ARM at 80 kV) and helium ion microscopy (HeIM, Zeiss Orion at

Amplified cross-linking efficiency of self-assembled monolayers through targeted dissociative electron attachment for the production of carbon nanomembranes

• Sascha Koch,
• Christopher D. Kaiser,
• Paul Penner,
• Michael Barclay,
• Lena Frommeyer,
• Daniel Emmrich,
• Patrick Stohmann,
• Tarek Abu-Husein,
• Andreas Terfort,
• D. Howard Fairbrother,
• Oddur Ingólfsson and
• Armin Gölzhäuser

Beilstein J. Nanotechnol. 2017, 8, 2562–2571, doi:10.3762/bjnano.8.256

• more than ten times faster cross-linking of 2-I-BPT SAMs compared to those made from the other halogenated biphenyls or from native BPT at the same current density. Furthermore, the transfer of a freestanding membrane onto a TEM grid and the subsequent investigation by helium ion microscopy (HIM

• nanomembrane; dissociative electron attachment; dissociative ionization; helium ion microscopy; self-assembled monolayers; X-ray photoelectron spectroscopy; Introduction Carbon nanomembranes (CNMs) are two-dimensional molecular sheets with a thickness of one to a few nanometers, high mechanical strength, and

• , for instance, helium ion microscopy (HIM) [1][8]. However, since the latter procedure has to be conducted for each individual exposure time it is significantly more labor intensive. Nevertheless, for reasons of reliability, here we have applied both these approaches to follow the cross-linking of the

Ion beam profiling from the interaction with a freestanding 2D layer

• Ivan Shorubalko,
• Kyoungjun Choi,
• Michael Stiefel and
• Hyung Gyu Park

Beilstein J. Nanotechnol. 2017, 8, 682–687, doi:10.3762/bjnano.8.73

• beam source. For imaging the milled pores we use scanning electron microscopy (SEM), scanning transmission electron microscopy (STEM) and helium ion microscopy (HIM). All methods give similar results regarding the measured focused ion beam profiles. Finally, we discuss technical limitations and

Fundamental properties of high-quality carbon nanofoam: from low to high density

• Natalie Frese,
• Shelby Taylor Mitchell,
• Christof Neumann,
• Amanda Bowers,
• Armin Gölzhäuser and
• Klaus Sattler

Beilstein J. Nanotechnol. 2016, 7, 2065–2073, doi:10.3762/bjnano.7.197

• Bielefeld, Germany 10.3762/bjnano.7.197 Abstract Highly uniform samples of carbon nanofoam from hydrothermal sucrose carbonization were studied by helium ion microscopy (HIM), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. Foams with different densities were produced by changing the

• and a stronger sp3-type electronic contribution, related to the inclusion of sp3 connections in their surface network. Keywords: carbon nanofoam; helium ion microscopy; hydrothermal carbonization; nanocarbons; Introduction Nanofoams are of considerable current interest due to their unique structure

• materials with different densities produced by naphthalene-assisted hydrothermal sucrose carbonization. Structural, compositional, and vibrational information is obtained by helium ion microscopy (HIM), XPS (X-ray photoelectron spectroscopy), and Raman spectroscopy, respectively. We find significant

Numerical investigation of depth profiling capabilities of helium and neon ions in ion microscopy

• Patrick Philipp,
• Lukasz Rzeznik and
• Tom Wirtz

Beilstein J. Nanotechnol. 2016, 7, 1749–1760, doi:10.3762/bjnano.7.168

• profiling; helium ion microscopy; ion bombardment; numerical simulations; polymers; SDTRIMSP; Introduction Ion bombardment of polymer samples has been studied for various applications related to surface modifications and surface analysis. Ion bombardment of polymers allows to change the electric

Fabrication and characterization of branched carbon nanostructures

• Sharali Malik,
• Yoshihiro Nemoto,
• Hongxuan Guo,
• Katsuhiko Ariga and
• Jonathan P. Hill

Beilstein J. Nanotechnol. 2016, 7, 1260–1266, doi:10.3762/bjnano.7.116

• (Renishaw inVia), TEM (Tecnai F20 ST at 200 kV), HRTEM (Jeol ARM at 120 kV), SEM (Zeiss Ultra-Plus at 5 kV), SEM (Zeiss Leo 1530 at 10 kV with Oxford X-Max 50 EDX ) and helium ion microscopy (HeIM, Zeiss Orion at 30 kV). a) SEM overview of a Baytubes agglomerated pellet; b, c) SEM details of the MWCNTs; d

Experimental and simulation-based investigation of He, Ne and Ar irradiation of polymers for ion microscopy

• Lukasz Rzeznik,
• Yves Fleming,
• Tom Wirtz and
• Patrick Philipp

Beilstein J. Nanotechnol. 2016, 7, 1113–1128, doi:10.3762/bjnano.7.104

• . Keywords: Helium ion microscopy; irradiation; polymers; preferential sputtering; secondary ion mass spectrometry; simulations; Introduction Progress in materials and life sciences requires sample characterisation with high lateral resolution and high sensitivity. A technique which allows for both is

Efficient electron-induced removal of oxalate ions and formation of copper nanoparticles from copper(II) oxalate precursor layers

• Kai Rückriem,
• Sarah Grotheer,
• Henning Vieker,
• Paul Penner,
• André Beyer,
• Armin Gölzhäuser and
• Petra Swiderek

Beilstein J. Nanotechnol. 2016, 7, 852–861, doi:10.3762/bjnano.7.77

• infrared spectroscopy (RAIRS). Helium ion microscopy (HIM) reveals the formation of spherical nanoparticles with well-defined size and X-ray photoelectron spectroscopy (XPS) confirms their metallic nature. Continued irradiation after depletion of oxalate does not lead to further particle growth giving

• exposed to 16000 μC/cm2 of 50 eV electrons. Helium ion microscopy measurements Helium ion microscopy (HIM) employs a finely focused beam of He+ ions with a diameter down to 0.35 nm, which is scanned over the sample. The secondary electrons (SE) generated by the ion impact are detected. HIM was performed

• exposure points to the formation of chemisorbed CO with the value being characteristic for a copper surface [33]. We note that formation and retention of CO2 was equally observed at 50 eV but CO was not as prominent (see Supporting Information File 1, Figure S1 and Figure S2). Helium ion microscopy The

Hydration of magnesia cubes: a helium ion microscopy study

• Ruth Schwaiger,
• Johannes Schneider,
• Gilles R. Bourret and
• Oliver Diwald

Beilstein J. Nanotechnol. 2016, 7, 302–309, doi:10.3762/bjnano.7.28

• these oxides are in physical contact with a solid substrate such as the ones used for immobilization to perform electron or ion microscopy imaging. We used helium ion microscopy (HIM) and investigated morphological changes of vapor-phase-grown MgO cubes after vacuum annealing and pressing into foils of

• images are not directly compromised [16]. In addition to the high SE-yield, helium ion microscopy allows the use of low beam currents for imaging [7]. For biological materials and polymers, HIM is preferable to SEM for high resolution imaging due to the problems related to electron-beam-induced damage

• that were grown and processed in dry vacuum environments prior to imaging with helium ion microscopy. The volume expansions observed are attributed to surface reactions between the MgO cubes and water molecules originating as physisorbed species from an indium foil that was employed as a conductive